Bird Model 4421 Precision RF Power Meter
for Semiconductor Processing Aplications
Features
1. ?1% Accuracy — Accomplished through the use of an automatic frequency compensation scheme, where the error contributions due to directional coupler frequency response characteristics are eliminated.
2. Wide Dynamic Range — The instrument will meet the full accuracy specification over a 35 dB dynamic range.
3. Excellent Measurement Repeatability — Typically <0.1%
4. Digital Display — Along with automatic VSWR calculation.
Details
The Bird Model 4421 is a precision RF power meter that, while originally intended for general purpose laboratory applications where high accuracy is required, has found wide acceptance in semiconductor processing applications. The product is configured as a system, consisting of the Model 4421 digital display and a precision power sensor selected for the application based upon maximum power and operating frequency