FPG8601 Force Balanced Piston Gauge
FPG8601 addresses the need for a means of maintaining long term traceability with very low uncertainty in the pressure range under that covered by conventional piston gauges. The measurement range covered is from zero (0.5 Pa in absolute) to 15 kPa (112 Torr, 2.2 psi) in both gauge and absolute modes. Measurement uncertainty ? 30 ppm of reading. FPG8601 offers fully automated operation; reasonable size and weight and has no environmental requirements beyond those typically found in a high end metrology laboratory.
1. Covers the range of 0 to 15 kPa (113 Torr) in gauge, absolute differential and absolute modes.
2. Resolution to 1 mPa (0.0075 mTorr, 0.000004 in. H2O).
3. Measurement uncertainty to:? (5 mPa + 30 ppm of reading) in gauge and absolute differential mode, ? (8 mPa + 30 ppm of reading) in absolute mode.
4. Fully automated operation including pressure control and DUT data acquisition allows multi-increment tests to be run unattended. Integrated thermal transpiration correction available when needed.